Application of focused ion beam for machining of nanopillar sheet

QR Code

Application of focused ion beam for machining of nanopillar sheet

This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...

Full description

Bibliographic Details
Main Author:	Ali, Mohammad Yeakub
Format:	Monograph
Language:	English
Published:	s.n 2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf

Similar Items

Fabrication of silicon nanopillar sheet for Cell Culture Dish
by: Ali, Mohammad Yeakub, et al.
Published: (2011)

Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
by: Ali, Mohammad Yeakub, et al.
Published: (2010)

Nanopillar Array for Cell Culture Dish
by: Ali, Mohammad Yeakub
Published: (2011)

Focused ion beam machining of cell culture dish
by: Ali, Mohammad Yeakub
Published: (2008)

Focused ion beam micromachining of mems
by: Ali, Mohammad Yeakub
Published: (2008)

A review of focused ion beam sputtering
by: Ali, Mohammad Yeakub, et al.
Published: (2010)

Investigation of microholes produced by focused ion beam micromachining
by: Mohd Fuad, Nurul Hajar, et al.
Published: (2011)

Investigation of Microholes Produced by Focused Ion Beam Micromachining
by: Mohd. Fuad, Nurul Hajar, et al.
Published: (2010)

Fabrication of Bio-MEMS Nanostructure by focused ion beam
by: Ali, Mohammad Yeakub, et al.
Published: (2010)

Micromilling of tungsten carbide using focused ion beam
by: Ali, Mohammad Yeakub, et al.
Published: (2005)

Focused ion beam machining of silicon
by: Hung, NguyenPhu, et al.
Published: (2002)

Focused Ion Beam Nanomachining of Cell Culture Sheet (softcopy not yet available)
by: Ali, Mohammad Yeakub
Published: (2011)

Application of focused ion beam micromachining: a review
by: Rahman Azmil, Nur Atiqah, et al.
Published: (2012)

Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
by: Ali, Mohammad Yeakub, et al.
Published: (2006)

Parametric study of sputtering microchannels via focused ion beam (FIB)
by: Mohd Shahar, Siti Fatimah, et al.
Published: (2015)

Surface integrity and removal rate of silicon sputtered with focused ion beam
by: Hung, NguyenPhu, et al.
Published: (2001)

Application of silicon carbide in abrasive water jet machining
by: Khan, Ahsan Ali, et al.
Published: (2011)

Fabrication of Micropillar Sheet for Cell Culture Dish
by: Ali, Mohammad Yeakub, et al.
Published: (2011)

Fabrication of micropillar sheet for cell culture dish
by: Ali, Mohammad Yeakub, et al.
Published: (2011)

Powder mixed micro electro discharge machining (PMμEDM)
by: Ali, Mohammad Yeakub
Published: (2011)

Analysis of acoustic emission during abrasive waterjet machining of sheet metals
by: Nazrin, Mokhtar, et al.
Published: (2018)

Experimental study of conventional wire electrical discharge machining for microfabrication
by: Ali, Mohammad Yeakub, et al.
Published: (2008)

Fabricating hot embossing micro tool using electrodischarge machining
by: Mohammad, Ammar Sami, et al.
Published: (2006)

Surface roughness of ion-sputtered micromold
by: Ali, Mohammad Yeakub, et al.
Published: (2001)

Fabrication of micro cavities by micro electrical discharged machining
by: Ali, Mohammad Yeakub, et al.
Published: (2000)

Wire electrical discharge machining for microfabrication
by: Ali, Mohammad Yeakub, et al.
Published: (2007)

Geometrical integrity of microholes drilled by conventional and micro electrical discharge machining
by: Ali, Mohammad Yeakub, et al.
Published: (2008)

Effect of Process Parameters on Abrasive Contamination During Water Abrasive Jet Machining of Mild Steel
by: Afifah, Ali, et al.
Published: (2010)

Effect of discharge current and electrode size on material removal rate and wear ratio in electrical discharge machining
by: Khan, Ahsan Ali, et al.
Published: (2010)

Minimum chip thickness in machining MEMS structure using Tool Based Micromilling
by: Ali, Mohammad Yeakub, et al.
Published: (2011)

Cutting force impact to tool life of CT5015 in high speed machining by applying negative rake angles
by: Adesta, Erry Yulian Triblas, et al.
Published: (2012)

Effect of peak current on material removal rate for electrical discharge machining of non-conductive Al2O3 ceramic
by: Moudood, M. A., et al.
Published: (2014)

Dry electrical discharge machining: an environmental friendly machining process
by: Ali, Mohammad Yeakub
Published: (2018)

Micro-manufacturing technology: the huge opportunity of thinking small
by: Ali, Mohammad Yeakub
Published: (2011)

Noble tool based micromilling for nanometric surface finish
by: Ali, Mohammad Yeakub
Published: (2011)

Development of micro end milling process for fabricating MEMS
by: Ali, Mohammad Yeakub
Published: (2009)

Micro-drilling of metallic materials for microsystems technology
by: Ali, Mohammad Yeakub
Published: (2008)

Geometrical integrity of microholes produced by micro-EDM
by: Ali, Mohammad Yeakub
Published: (2008)

Comparative study of conventional and micro WEDM based on machining of meso/micro sized spur gear
by: Ali, Mohammad Yeakub, et al.
Published: (2010)

Influence of Wire Electrical Discharge Machining (WEDM) process parameters on surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2018)