Surface roughness of FIB sputtered silicon

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Surface roughness of FIB sputtered silicon

Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
Other Authors:	Inasaki, Ichiro
Format:	Proceeding Paper
Language:	English
Published:	Kluwer Academic Publishers (Springer) 2001
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/28903/ http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf

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