Surface roughness of FIB sputtered silicon
Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
Kluwer Academic Publishers (Springer)
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/28903/ http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf |
| _version_ | 1848780030523473920 |
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| author | Ali, Mohammad Yeakub Hung, N. P. Yuan, S. |
| author2 | Inasaki, Ichiro |
| author_facet | Inasaki, Ichiro Ali, Mohammad Yeakub Hung, N. P. Yuan, S. |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | Mathematical models are developed to calculate the surface roughness
of focused-ion-beam (FIB) sputtered surface. The surface roughness is the
combination of the beam function and the material function. The beam
function includes ion type, acceleration voltage, ion flux, intensity
distribution, dwell time, etc; the material function includes the inherent
material properties related to FIB micromachining. Surface of FIB sputtered
(100) silicon was characterized using atomic force microscope. Reasonable
agreement between the calculated and measured surface roughness was
found. |
| first_indexed | 2025-11-14T15:27:11Z |
| format | Proceeding Paper |
| id | iium-28903 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:27:11Z |
| publishDate | 2001 |
| publisher | Kluwer Academic Publishers (Springer) |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-289032013-06-25T05:23:30Z http://irep.iium.edu.my/28903/ Surface roughness of FIB sputtered silicon Ali, Mohammad Yeakub Hung, N. P. Yuan, S. TJ Mechanical engineering and machinery TS Manufactures Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution, dwell time, etc; the material function includes the inherent material properties related to FIB micromachining. Surface of FIB sputtered (100) silicon was characterized using atomic force microscope. Reasonable agreement between the calculated and measured surface roughness was found. Kluwer Academic Publishers (Springer) Inasaki, Ichiro 2001 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf Ali, Mohammad Yeakub and Hung, N. P. and Yuan, S. (2001) Surface roughness of FIB sputtered silicon. In: Precision Engineering at the Beginning of a Millenium (ICPE), 18-20 July 2001, Yokohama, Japan. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Hung, N. P. Yuan, S. Surface roughness of FIB sputtered silicon |
| title | Surface roughness of FIB sputtered silicon |
| title_full | Surface roughness of FIB sputtered silicon |
| title_fullStr | Surface roughness of FIB sputtered silicon |
| title_full_unstemmed | Surface roughness of FIB sputtered silicon |
| title_short | Surface roughness of FIB sputtered silicon |
| title_sort | surface roughness of fib sputtered silicon |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/28903/ http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf |