Structural properties of deposited ZnO thin films on flexible
substrates at various substrate temperatures and RF power

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Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF powe...

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Bibliographic Details
Main Authors:	Muhamad Suki, Nur Sa'adah, Herman, Sukreen Hana, Ani, Mohd Hanafi, Mahmood, Mohamad Rusop
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2012
Subjects:	TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/1/Structural_properties_of_deposited_ZnO_thin_films_on_flexible_substrate_at_various_substrate_temperatures_and_Rf_power.pdf

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