Fabrication of three dimensional micro-components – A review

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Fabrication of three dimensional micro-components – A review

Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused io...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, Wayne N.P.
Format:	Proceeding Paper
Language:	English
Published:	2000
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf

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