Fabrication of three dimensional micro-components – A review
Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused io...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |
| _version_ | 1848779798472556544 |
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| author | Ali, Mohammad Yeakub Hung, Wayne N.P. |
| author_facet | Ali, Mohammad Yeakub Hung, Wayne N.P. |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process. |
| first_indexed | 2025-11-14T15:23:30Z |
| format | Proceeding Paper |
| id | iium-27307 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:23:30Z |
| publishDate | 2000 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-273072013-08-26T08:10:26Z http://irep.iium.edu.my/27307/ Fabrication of three dimensional micro-components – A review Ali, Mohammad Yeakub Hung, Wayne N.P. TJ Mechanical engineering and machinery TS Manufactures Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process. 2000 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf Ali, Mohammad Yeakub and Hung, Wayne N.P. (2000) Fabrication of three dimensional micro-components – A review. In: 6th Annual Paper Meet & International Conference on Mechanical Engineering in the 21st Century , 17-19 February 2000, Dhaka, Bangladesh. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Hung, Wayne N.P. Fabrication of three dimensional micro-components – A review |
| title | Fabrication of three dimensional micro-components – A review |
| title_full | Fabrication of three dimensional micro-components – A review |
| title_fullStr | Fabrication of three dimensional micro-components – A review |
| title_full_unstemmed | Fabrication of three dimensional micro-components – A review |
| title_short | Fabrication of three dimensional micro-components – A review |
| title_sort | fabrication of three dimensional micro-components – a review |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |