Fabrication of micro cavities by micro electrical discharged machining

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Fabrication of micro cavities by micro electrical discharged machining

The LIGA (Lithography, Electroplating and Molding) technique can fabricate high aspect ratio micro components with sub-micrometer accuracy and few tens of nano meter surface finish. This technique uses deep x-ray lithography with synchrotron radiation and as a result, the process becomes very comple...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, Wayne N.P.
Format:	Proceeding Paper
Language:	English
Published:	2000
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/27305/ http://irep.iium.edu.my/27305/1/070_ICM_2000_BUET_285-291.pdf

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