Surface roughness of ion-sputtered micromold

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Surface roughness of ion-sputtered micromold

This paper discusses the development of mathematical models for the calculation of surface roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized first and then the beam function was developed. Material function was developed from the inherent mater...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Bryan, N. K. A., Hung, W. N. P., Alauddin, M., Yuan, S.
Format:	Proceeding Paper
Language:	English
Published:	2001
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/27302/ http://irep.iium.edu.my/27302/1/067_ICME_2001_Dhaka_207-212.pdf

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