Hot embossing and injection molding of three-dimensional microcomponents

This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering...

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Main Authors: Ali, Mohammad Yeakub, Ngoi, B. K. A., Hung, N. P., Yuan, S., Lee, C.P.
Format: Proceeding Paper
Language:English
Published: 2001
Subjects:
Online Access:http://irep.iium.edu.my/27184/
http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf
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author Ali, Mohammad Yeakub
Ngoi, B. K. A.
Hung, N. P.
Yuan, S.
Lee, C.P.
author_facet Ali, Mohammad Yeakub
Ngoi, B. K. A.
Hung, N. P.
Yuan, S.
Lee, C.P.
author_sort Ali, Mohammad Yeakub
building IIUM Repository
collection Online Access
description This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering. Microgears, microgear trains, microlenses etc. were successfully replicated from polymers. The overall size of these microcomponents were few tens to few hundred micrometers. These replicated microcomponents were inspected with scanning electron microscope where submicrometer accuracy and faithful replication of cavity surface texture were observed.
first_indexed 2025-11-14T15:23:09Z
format Proceeding Paper
id iium-27184
institution International Islamic University Malaysia
institution_category Local University
language English
last_indexed 2025-11-14T15:23:09Z
publishDate 2001
recordtype eprints
repository_type Digital Repository
spelling iium-271842013-09-04T02:37:54Z http://irep.iium.edu.my/27184/ Hot embossing and injection molding of three-dimensional microcomponents Ali, Mohammad Yeakub Ngoi, B. K. A. Hung, N. P. Yuan, S. Lee, C.P. TJ Mechanical engineering and machinery TS Manufactures This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering. Microgears, microgear trains, microlenses etc. were successfully replicated from polymers. The overall size of these microcomponents were few tens to few hundred micrometers. These replicated microcomponents were inspected with scanning electron microscope where submicrometer accuracy and faithful replication of cavity surface texture were observed. 2001 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf Ali, Mohammad Yeakub and Ngoi, B. K. A. and Hung, N. P. and Yuan, S. and Lee, C.P. (2001) Hot embossing and injection molding of three-dimensional microcomponents. In: BSME-ASME International Conference on Thermal Engineering, 31 December 2001 - 02 January 2002, Dhaka, Bangladesh.
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Ngoi, B. K. A.
Hung, N. P.
Yuan, S.
Lee, C.P.
Hot embossing and injection molding of three-dimensional microcomponents
title Hot embossing and injection molding of three-dimensional microcomponents
title_full Hot embossing and injection molding of three-dimensional microcomponents
title_fullStr Hot embossing and injection molding of three-dimensional microcomponents
title_full_unstemmed Hot embossing and injection molding of three-dimensional microcomponents
title_short Hot embossing and injection molding of three-dimensional microcomponents
title_sort hot embossing and injection molding of three-dimensional microcomponents
topic TJ Mechanical engineering and machinery
TS Manufactures
url http://irep.iium.edu.my/27184/
http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf