Micromilling of tungsten carbide using focused ion beam
This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf |
| _version_ | 1848779775328387072 |
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| author | Ali, Mohammad Yeakub Ong, A. S. Konneh, Mohamed |
| author_facet | Ali, Mohammad Yeakub Ong, A. S. Konneh, Mohamed |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for
the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time,
etc. were investigated in this study. A series of experiments were conducted on tungsten carbide with
varying operating parameters to establish the correlation how the parameters affect the micromilling
process and quality of the final component. All the experiments were carried out with dry micromilling
using serpentine scanning mode. Empirical models were formulated to predict the sputtered depth which
increased with higher ion dose significantly but the relationship was nonlinear. Some of the experimental
results are discussed with qualitative judgement as it was difficult to explain quantitatively. |
| first_indexed | 2025-11-14T15:23:08Z |
| format | Proceeding Paper |
| id | iium-27180 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:23:08Z |
| publishDate | 2005 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-271802013-08-26T06:41:32Z http://irep.iium.edu.my/27180/ Micromilling of tungsten carbide using focused ion beam Ali, Mohammad Yeakub Ong, A. S. Konneh, Mohamed TJ Mechanical engineering and machinery TS Manufactures This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten carbide with varying operating parameters to establish the correlation how the parameters affect the micromilling process and quality of the final component. All the experiments were carried out with dry micromilling using serpentine scanning mode. Empirical models were formulated to predict the sputtered depth which increased with higher ion dose significantly but the relationship was nonlinear. Some of the experimental results are discussed with qualitative judgement as it was difficult to explain quantitatively. 2005 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf Ali, Mohammad Yeakub and Ong, A. S. and Konneh, Mohamed (2005) Micromilling of tungsten carbide using focused ion beam. In: International Conference on Mechanical Engineering 2005 (ICME2005), 28-30 December 2005, Dhaka, Bangladesh. http://www.buet.ac.bd/me/icme/icme2005/Proceedings/PDF/ICME05-AM-24.pdf |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Ong, A. S. Konneh, Mohamed Micromilling of tungsten carbide using focused ion beam |
| title | Micromilling of tungsten carbide using focused ion beam |
| title_full | Micromilling of tungsten carbide using focused ion beam |
| title_fullStr | Micromilling of tungsten carbide using focused ion beam |
| title_full_unstemmed | Micromilling of tungsten carbide using focused ion beam |
| title_short | Micromilling of tungsten carbide using focused ion beam |
| title_sort | micromilling of tungsten carbide using focused ion beam |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf |