Sputtering of paraboloid microstructure using fib

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Sputtering of paraboloid microstructure using fib

This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices w...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Loo, Y. W.
Format:	Proceeding Paper
Language:	English
Published:	2006
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/27177/ http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf

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