Focused ion beam micromachining of mems

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Focused ion beam micromachining of mems

This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measure...

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Bibliographic Details
Main Author:	Ali, Mohammad Yeakub
Format:	Proceeding Paper
Language:	English
Published:	2008
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/27164/ http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf

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