Focused ion beam micromachining of mems
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measure...
| Main Author: | |
|---|---|
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27164/ http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf |
| _version_ | 1848779771841871872 |
|---|---|
| author | Ali, Mohammad Yeakub |
| author_facet | Ali, Mohammad Yeakub |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper discussed focused ion beam micro nano machining to fabricate MEMS
(microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM)
tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was
tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity
were observed. Micromilling tool fabricated using FIB sputtering was used in micromilling with desktop
milling machine to machine microchannels. Cavities of hair-sized microgear were sputtered using FIB
with submicrometer accuracy and nanometric leveled surface finish. Microcavities were used in
microinjection molding for mass production of polymer microcomponents. The overall sizes of these
microcomponents were few tens to few hundreds micrometers. The replicated microcomponents were
inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of
the cavity was observed. These fabricated microcomponents have potential application in biomedical and
other microelectromechanical systems. |
| first_indexed | 2025-11-14T15:23:05Z |
| format | Proceeding Paper |
| id | iium-27164 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:23:05Z |
| publishDate | 2008 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-271642013-09-05T03:58:17Z http://irep.iium.edu.my/27164/ Focused ion beam micromachining of mems Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used in micromilling with desktop milling machine to machine microchannels. Cavities of hair-sized microgear were sputtered using FIB with submicrometer accuracy and nanometric leveled surface finish. Microcavities were used in microinjection molding for mass production of polymer microcomponents. The overall sizes of these microcomponents were few tens to few hundreds micrometers. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed. These fabricated microcomponents have potential application in biomedical and other microelectromechanical systems. 2008 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf Ali, Mohammad Yeakub (2008) Focused ion beam micromachining of mems. In: International Symposium on Advanced Mechatronics Engineering, 29 February 2008, Changwon, S. Korea. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Focused ion beam micromachining of mems |
| title | Focused ion beam micromachining of mems |
| title_full | Focused ion beam micromachining of mems |
| title_fullStr | Focused ion beam micromachining of mems |
| title_full_unstemmed | Focused ion beam micromachining of mems |
| title_short | Focused ion beam micromachining of mems |
| title_sort | focused ion beam micromachining of mems |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/27164/ http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf |