Fabrication of micromold cavity for microreplication: A review

In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...

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Main Authors: Ali, Mohammad Yeakub, Khan, Ahsan Ali, Mehfuz, R., Aishah, S., Hayati, N., Hajar, N.
Format: Proceeding Paper
Language:English
Published: 2008
Subjects:
Online Access:http://irep.iium.edu.my/27157/
http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf
_version_ 1848779769914589184
author Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
author_facet Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
author_sort Ali, Mohammad Yeakub
building IIUM Repository
collection Online Access
description In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication.
first_indexed 2025-11-14T15:23:03Z
format Proceeding Paper
id iium-27157
institution International Islamic University Malaysia
institution_category Local University
language English
last_indexed 2025-11-14T15:23:03Z
publishDate 2008
recordtype eprints
repository_type Digital Repository
spelling iium-271572013-09-06T01:23:01Z http://irep.iium.edu.my/27157/ Fabrication of micromold cavity for microreplication: A review Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. TS Manufactures In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication. 2008 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf Ali, Mohammad Yeakub and Khan, Ahsan Ali and Mehfuz, R. and Aishah, S. and Hayati, N. and Hajar, N. (2008) Fabrication of micromold cavity for microreplication: A review. In: International Conference on Mechanical and Manufacturing Engineering (ICME 2008), 21-23 May 2008, Johor Bahru, Malaysia.
spellingShingle TS Manufactures
Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
Fabrication of micromold cavity for microreplication: A review
title Fabrication of micromold cavity for microreplication: A review
title_full Fabrication of micromold cavity for microreplication: A review
title_fullStr Fabrication of micromold cavity for microreplication: A review
title_full_unstemmed Fabrication of micromold cavity for microreplication: A review
title_short Fabrication of micromold cavity for microreplication: A review
title_sort fabrication of micromold cavity for microreplication: a review
topic TS Manufactures
url http://irep.iium.edu.my/27157/
http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf