Mathematical modeling of sputtering-induced surface roughness

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Mathematical modeling of sputtering-induced surface roughness

This paper develops a sputtering-induced surface roughness model. The model is necessary to control surface roughness of a replicating tool that is machined by focused ion beam (FIB). The significant Gaussian intensity level of FIB profile is determined first, the mathematical model of surface rough...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
Format:	Proceeding Paper
Language:	English
Published:	2001
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27142/ http://irep.iium.edu.my/27142/1/034_DTIP-SPIE_France_2001_510-521_Ali.pdf

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