Producing LIGA-competitive microcomponents

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Producing LIGA-competitive microcomponents

This paper presents a new technique to investigate deep microfeatures, and an alternative process to produce microcomponents. Micro-EDM and focused ion beam micromachining were combined to directly fabricate the mold features. The first process was to remove the bulk material while the later was to...

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Bibliographic Details
Main Authors:	Hung, N. P., Ali, Mohammad Yeakub, Yuan, S.
Format:	Proceeding Paper
Language:	English
Published:	2000
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27137/ http://irep.iium.edu.my/27137/1/036_SPIE_USA_2000_4147_49-57_Wayne.pdf

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