Molding of three-dimensional microcomponents

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Molding of three-dimensional microcomponents

Traditional micromanufacturing has been developed for semiconductor industry. Selected micro electrical mechanical systems (MEMS) have been successfully developed and implemented in industry. Since current MEMS are designed for manufacture using microelectronics processes, they are limited to two-di...

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Bibliographic Details
Main Authors:	Hung, W. N. P., Agnihotri, M. M., Ali, Mohammad Yeakub, Yuan, S.
Format:	Proceeding Paper
Language:	English
Published:	2006
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27123/ http://irep.iium.edu.my/27123/1/033_ASME_2006_Hung.pdf

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