Surface roughness of sputtered silicon. II. Model verification

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Surface roughness of sputtered silicon. II. Model verification

Experimental verification of the mathematical surface roughness model for sputtered silicon was performed. The beam shape and its significant level of intensity were determined first by measuring the topography of craters sputtered by focused ion beam (FIB). Then the beam function was generated for...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, NguyenPhu
Format:	Article
Language:	English
Published:	Taylor and Francis Inc. 2001
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27112/ http://irep.iium.edu.my/27112/1/024_MaMP_2001_16%283%29_315-329.pdf

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