Surface roughness of sputtered silicon. I. surface modeling

QR Code

Surface roughness of sputtered silicon. I. surface modeling

A mathematical model for the calculation of surface roughness was developed for focused ion beam (FIB) sputtering. The surface roughness function is a combination of the beam function and the material function. The beam function includes ion type, ion acceleration energy, and beam parameters. Fur...

Full description

Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, N. P.
Format:	Article
Language:	English
Published:	Taylor & Francis 2001
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27111/ http://irep.iium.edu.my/27111/1/023_MaMP_2001_16%283%29_297-313.pdf

Similar Items

Sidewall surface roughness of Sputtered Silicon 1: surface modelling
by: Ali, Mohammad Yeakub, et al.
Published: (2003)

Surface roughness of sputtered silicon. II. Model verification
by: Ali, Mohammad Yeakub, et al.
Published: (2001)

Surface roughness of FIB sputtered silicon
by: Ali, Mohammad Yeakub, et al.
Published: (2001)

Mathematical modeling of sputtering-induced surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2001)

Surface roughness of ion-sputtered micromold
by: Ali, Mohammad Yeakub, et al.
Published: (2001)

Surface integrity and removal rate of silicon sputtered with focused ion beam
by: Hung, NguyenPhu, et al.
Published: (2001)

Investigation of vibration and surface roughness in micro milling of PMMA
by: Ali, Mohammad Yeakub, et al.
Published: (2012)

Influence of micro end milling process parameters on surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2008)

Portable non-contact surface roughness measuring device
by: Z. F. Z., Abidin, et al.
Published: (2019)

A review of focused ion beam sputtering
by: Ali, Mohammad Yeakub, et al.
Published: (2010)

Particle Swarm Optimisation Prediction Model for Surface Roughness
by: M. M., Noor, et al.
Published: (2011)

Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
by: Sabur, Abdus, et al.
Published: (2013)

Surface roughness analysis of beryllium-copper alloy in micro end milling
by: Mehfuz, R., et al.
Published: (2007)

Surface finish prediction models for precision grinding of silicon
by: Alao, Abdur-Rasheed, et al.
Published: (2011)

An investigation on morphology of hard-brittle silicon surface by diamond grinding
by: Konneh, Mohamed, et al.
Published: (2006)

Influence of machining parameters on surface roughness during EDM of mild steel
by: Khan, Ahsan Ali, et al.
Published: (2011)

Precision surface grinding of silicon carbide
by: Konneh, Mohamed
Published: (2016)

Surrogate Modelling to Predict Surface Roughness and Surface Texture When Grinding AISI 1042 Carbon Steel
by: K., Kadirgama, et al.
Published: (2012)

Modelling the surface roughness behaviour of an EDMed workpiece with different tool electrodes using DoE
by: Mohammed Baba, Ndaliman, et al.
Published: (2013)

Modelling the surface roughness behaviour of an EDMed workpiece with different tool electrodes using DoE
by: Ndaliman, Mohammed Baba, et al.
Published: (2013)

An Improved Mathematical Model to Predict Surface Roughness Using Hybrid Method
by: M. F. F., Ab Rashid
Published: (2015)

Focused ion beam machining of silicon
by: Hung, NguyenPhu, et al.
Published: (2002)

Statistical approach to modeling & optimization of surface roughness in high speed end milling of silicon with diamond coated tools
by: Amin, A. K. M. Nurul, et al.
Published: (2012)

Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach
by: Ali, Mohammad Yeakub, et al.
Published: (2007)

Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
by: Ali, Mohammad Yeakub, et al.
Published: (2006)

Micro wire electro discharge grinding: optimization of material removal rate and surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2017)

The Effect of EDM with external magnetic field on surface roughness of stainless steel
by: Khan, Ahsan Ali, et al.
Published: (2013)

Parametric study of sputtering microchannels via focused ion beam (FIB)
by: Mohd Shahar, Siti Fatimah, et al.
Published: (2015)

Artificial intelligence model to predict surface roughness of Ti-15-3 alloy in EDM process
by: Khan, Md. Ashikur Rahman, et al.
Published: (2011)

Modeling and analysis of MRR, EWR and surface roughness in EDM milling through response surface methodology
by: Asif Iqbal, A.K.M., et al.
Published: (2010)

Sputtering of paraboloid microstructure using fib
by: Ali, Mohammad Yeakub, et al.
Published: (2006)

Effects of tool path strategies on surface roughness in high speed milling
by: Abdul Rashid, Muhammad
Published: (2012)

Application of Taguchi methods in the optimization of cutting parameters for surface roughness in turning
by: Mohamad Naim, Yusoff
Published: (2008)

Influence of Wire Electrical Discharge Machining (WEDM) process parameters on surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2018)

Analysis of WEDM process parameters on surface roughness and kerf using Taguchi method
by: Banu, Asfana, et al.
Published: (2017)

Study of surface roughness effects to liquid contact angle on solid surface
by: Mohd Shahrir Ashraf, Abdul Wahab
Published: (2016)

Effects on vibration and surface roughness in high speed micro end-milling of Inconel 718 with minimum quantity lubrication
by: Abd. Rahman, Mohamed, et al.
Published: (2017)

Investigation of surface roughness and material removal rate for high speed micro end milling on PMMA
by: Rahman Azmil, Nur Atiqah, et al.
Published: (2015)

Taguchi method approach on effect of lubrication condition on surface roughness in milling operation
by: Mohamad Syahmi, Shahrom
Published: (2012)

Surface Roughness Prediction for CNC Milling Process using Artificial Neural Network
by: M. F. F., Ab Rashid, et al.
Published: (2010)