Characterisation of surface texture using AFM with trimmed probe tip

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Characterisation of surface texture using AFM with trimmed probe tip

This paper discusses the scanning performance of a trimmed atomic force microscope (AFM) tip. A standard tip was trimmed by focused ion beam (FIB) sputtering to achieve a higher aspect ratio and sharpness. Microfeatures produced by FIB sputtering on a single crystal silicon substrate were scanned...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Lim, BengHai
Format:	Article
Language:	English
Published:	Maney Publishing 2006
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27098/ http://irep.iium.edu.my/27098/1/017_SE_22%286%29_2006_443-446.pdf

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