Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach

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Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach

This paper discusses the investigation of geometrical integrity of micromold cavity produced by focused ion beam (FIB) sputtering slice by slice. Parabolic shaped micromold cavity was chosen as an example. Preliminary experiments were carried out to characterize the machine and select the optim...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Loo, Yee Wei
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2007
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27097/ http://irep.iium.edu.my/27097/1/016_MST_13%281%29_2007_103-107.pdf

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