Application of focused ion beam micromachining: a review

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Application of focused ion beam micromachining: a review

Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...

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Bibliographic Details
Main Authors:	Rahman Azmil, Nur Atiqah, Jaafar, Israd Hakim, Ali, Mohammad Yeakub, Asfana, Banu
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2012
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf

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