Application of focused ion beam micromachining: a review
Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf |
| _version_ | 1848779744226574336 |
|---|---|
| author | Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu |
| author_facet | Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu |
| author_sort | Rahman Azmil, Nur Atiqah |
| building | IIUM Repository |
| collection | Online Access |
| description | Fabrication of micro and nanoscale components are in high demand for various
applications in diversified fields that include automotive, electronics, communication and medicine.
Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices.
This paper presents a review of FIB machining technology that include its parameter, responses, its
important component systems, as well as the fundamentals of imaging, milling (etching) and
deposition techniques. The application of FIB in micromachining is also presented. |
| first_indexed | 2025-11-14T15:22:38Z |
| format | Article |
| id | iium-27010 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:22:38Z |
| publishDate | 2012 |
| publisher | Trans Tech Publications, Switzerland |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-270102015-10-21T23:09:49Z http://irep.iium.edu.my/27010/ Application of focused ion beam micromachining: a review Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu TS Manufactures Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented. Trans Tech Publications, Switzerland 2012-10-08 Article PeerReviewed application/pdf en http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf Rahman Azmil, Nur Atiqah and Jaafar, Israd Hakim and Ali, Mohammad Yeakub and Asfana, Banu (2012) Application of focused ion beam micromachining: a review. Advanced Materials Research, 576. pp. 507-510. ISSN 1022-6680 http://www.scientific.net/AMR.576.507 10.4028/www.scientific.net/AMR.576.507 |
| spellingShingle | TS Manufactures Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu Application of focused ion beam micromachining: a review |
| title | Application of focused ion beam micromachining: a review |
| title_full | Application of focused ion beam micromachining: a review |
| title_fullStr | Application of focused ion beam micromachining: a review |
| title_full_unstemmed | Application of focused ion beam micromachining: a review |
| title_short | Application of focused ion beam micromachining: a review |
| title_sort | application of focused ion beam micromachining: a review |
| topic | TS Manufactures |
| url | http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf |