Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications

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Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications

High quality ZnO thin films are required to produce CMOS SAW resonators operating with low losses and high Q. This work intends to develop high performance CMOS SAW resonators through optimization of both the quality of the ZnO and the design of the SAW resonator. Zinc oxide was chosen for this w...

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Bibliographic Details
Main Authors:	Sidek, Fatini, Nordin, Anis Nurashikin, Othman, Raihan
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2012
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/26716/ http://irep.iium.edu.my/26716/1/Dr_Anis.pdf

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