Novel mems biosensor with integmted impedance and mass-sensing capabilities

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Novel mems biosensor with integmted impedance and mass-sensing capabilities

A BIOSENSOR DEVICE (1) PROVIDING AN ANALYSE PLATFORM FOR DETECNNG CELL GROWTH, COMPRISING OFAN ALUMINIUM NITRIDE (AIN) BASE (2), A SHEAR HORIZONTAL-SURFACE ACOUSTIC WAVE (SH-SAW) RESONATOR INCLUDING AN INPUT TMNSDUCER (4) AND AN OUTPUT TRA.NSDUCER (5) SYMMETRICALLY POSmONED ON THE ALUMTNUM NTTRIOE...

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Bibliographic Details
Main Authors:	Nordin, Anis Nurashikin, Ibrahimy, Muhammad Ibn, Mel, Maizirwan, Voiculescu, Ioana
Format:	Patent
Language:	English
Published:	2011
Subjects:	TP248.13 Biotechnology TP250 Industrial electrochemistry
Online Access:	http://irep.iium.edu.my/25808/ http://irep.iium.edu.my/25808/1/Biosensor_MyIPO.pdf

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