Minimum chip thickness in machining MEMS structure using Tool Based Micromilling

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Minimum chip thickness in machining MEMS structure using Tool Based Micromilling

Tool based micromilling is a promising micromanufacturing technology to produce miniaturized features of about 25μm in size frMEMS and Bio-MEMS applications.It is the most flexible and the fastest way to produce complex three dimensional microcomponents including sharp edges with surface finish at a...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Mass Duki, Siti Hamizah, Mansor, Noor Adila
Format:	Proceeding Paper
Language:	English
Published:	2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2558/ http://irep.iium.edu.my/2558/1/449_IRIIE_2011.pdf

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