Fabrication of aluminium doped zinc oxide piezoelectric thin ﬁlm on a silicon substrate for piezoelectric MEMS energy harvesters

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Fabrication of aluminium doped zinc oxide piezoelectric thin ﬁlm on a silicon substrate for piezoelectric MEMS energy harvesters

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS)energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable for...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim, Othman, Raihan
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2012
Subjects:	TP155 Chemical engineering
Online Access:	http://irep.iium.edu.my/25085/ http://irep.iium.edu.my/25085/1/25085.pdf

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