Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish

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Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish

This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
Other Authors:	Adesta, Erry Yulian Triblas
Format:	Proceeding Paper
Language:	English
Published:	Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM 2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2505/ http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf

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