Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...
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| Other Authors: | |
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2505/ http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf |
| _version_ | 1848776013989806080 |
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| author | Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar |
| author2 | Adesta, Erry Yulian Triblas |
| author_facet | Adesta, Erry Yulian Triblas Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopillars ranges from 1 to 5.5 μm with aspect ratio of 1-6. Empirical relationship of taper angle, aspect ratio and height of the nanopillar were established. Taper angle was found to be reduced as the height of the nanopillar increased. The taper angle of nanopillars depends on the acceleration voltage, probe current and dwell time. |
| first_indexed | 2025-11-14T14:23:21Z |
| format | Proceeding Paper |
| id | iium-2505 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:23:21Z |
| publishDate | 2010 |
| publisher | Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-25052012-01-31T07:51:22Z http://irep.iium.edu.my/2505/ Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar TJ Mechanical engineering and machinery TS Manufactures This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopillars ranges from 1 to 5.5 μm with aspect ratio of 1-6. Empirical relationship of taper angle, aspect ratio and height of the nanopillar were established. Taper angle was found to be reduced as the height of the nanopillar increased. The taper angle of nanopillars depends on the acceleration voltage, probe current and dwell time. Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM Adesta, Erry Yulian Triblas Yaacob, Iskandar Idris Ali, Mohammad Yeakub Maleque, Md. Abdul Mohamed Ariff, Tasnim Firdaus 2010 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf Ali, Mohammad Yeakub and Mohd Fuad, Nurul Hajar (2010) Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish. In: UNSPECIFIED. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title | Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title_full | Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title_fullStr | Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title_full_unstemmed | Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title_short | Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish |
| title_sort | fabrication of silicon nanopillar sheet for cell culture dish |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/2505/ http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf |