Top-down fabrication of single crystal silicon nanowire using optical lithography

QR Code

Top-down fabrication of single crystal silicon nanowire using optical lithography

A method for fabricating single crystal silicon nanowires is presented using top-down optical lithography and anisotropic etching. Wire diameters as small as 10 nm are demonstrated using silicon on insulator substrates. Structural characterization confirms that wires are straight, have a triangular...

Full description

Bibliographic Details
Main Authors:	Za'bah, Nor Farahidah, Kwa, Kelvin S. K., Bowen, Leon, Mendis, Budhika, O'Neill, Anthony
Format:	Article
Language:	English
Published:	American Institute of Physics 2012
Subjects:	QC Physics TA401 Materials of engineering and construction
Online Access:	http://irep.iium.edu.my/25004/ http://irep.iium.edu.my/25004/1/Top-down_fabrication_of_single_crystal_silicon_nanowire_using_optical.pdf

Similar Items

Optimization of the process modules for a top-down silicon nanowire fabrication using optical lithography and orientation dependent etching
by: Za'bah, Nor Farahidah, et al.
Published: (2013)

Electrical characterisation of highly doped triangular silicon nanowires
by: Za'bah, Nor Farahidah, et al.
Published: (2014)

The study on the aspect ratio of Atomic Force Microscope (AFM) measurements for Triangular Silicon Nanowire
by: Za'bah, Nor Farahidah, et al.
Published: (2013)

Material characterization of a doped triangular silicon nanowire using raman spectroscopy
by: Za'bah, Nor Farahidah, et al.
Published: (2018)

Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography
by: Abd Rahman, Siti Fatimah, et al.
Published: (2014)

Triangular shaped silicon nanowire FET characterization using COMSOL multiphysics
by: Yazeer, Mohamed Jameel, et al.
Published: (2016)

Top-down nanofabrication and characterization of 20 nm silicon nanowires for biosensing applications
by: Md Nor, Mohammad Nuzaihan, et al.
Published: (2016)

Etching Effect On The Formation Of Silicon Nanowire Transistor Patterned By AFM Lithography.
by: Abdullah, A. Makarimi, et al.
Published: (2010)

Nanoscale patterning by AFM lithography and its application on the fabrication of silicon nanowire devices
by: Sabar D. Hutagalung,, et al.
Published: (2014)

Fabrication and simulation of P-type junctionless silicon nanowire transistor using silicon on insulator and atomic force microscope nano lithography
by: Dehzangi, Arash
Published: (2012)

Effect Of Tetramethylammonium Hydroxide (TMAH) Etchant On The Formation Of Silicon Nanowires Transistor Patterned By Atomic Force Microscopy (AFM) Lithography
by: Lew, Kam Chung
Published: (2011)

Study the characteristic of p-type junction-less side gate silicon nanowire transistor fabricated by atomic force microscopy lithography
by: Dehzangi, Arash, et al.
Published: (2011)

Optimization Of Potassium Hydroxide (Koh) Etching On The Fabrication Of P-Type Silicon Nanowire Transistor Patterned By Atomic Force Microscopy Lithography
by: Abdullah, Ahmad Makarimi
Published: (2012)

Optimization Of Potassium Hydroxide (KOH) Etching On The Fabrication Of P-Type Silicon Nanowire Transistor Patterned By Atomic Force Microscopy Lithography
by: Abdullah, Ahmad Makarimi
Published: (2012)

Characterization of silicon nanowire transistor
by: Al Ariqi, Hani Taha, et al.
Published: (2019)

Design And Characterization Of Silicon Nanowire Transistor And Logic Nanowire Inverter Circuits
by: Naif, Yasir Hashim
Published: (2013)

Development of MEMS cantilever-based biosensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Silicon nanohole arrays fabricated by electron beam lithography and reactive ion etching
by: Lita Rahmasari,, et al.
Published: (2019)

Field effect in silicon nanostructure fabricated by atomic force microscopy nano lithography
by: Dehzangi, Arash, et al.
Published: (2011)

Analysis of silicon nanowires synthesized from SIO on silicon wafer substrate
by: Hamidinezhad, Habib, et al.
Published: (2009)

Silicon nanowire interface circuit for DNA detection
by: Usman, Kamilu Iman, et al.
Published: (2017)

Design and fabrication of silicon nanowire based sensor
by: Abd Rahman, Siti Fatimah, et al.
Published: (2013)

Silicon nanowire interface circuit for biosensing applications
by: Usman, Kamilu Iman, et al.
Published: (2015)

Smart steering auto alert system
by: Abdul Muin, Mohd Fahmi, et al.
Published: (2018)

The development of silicon nanowire as sensing material and its applications
by: Abdul Rashid, Jahwarhar Izuan, et al.
Published: (2013)

Top-Down Approaches to the Fabrication of Nanopatterned Electrodes
by: Lanyon, Y., et al.
Published: (2008)

Temperature characteristics of silicon nanowire transistor depending on oxide thickness
by: AlAriqi, Hani Taha, et al.
Published: (2019)

Temperature sensitivity of silicon nanowire transistor based on channel length
by: AlAriqi, Hani Taha, et al.
Published: (2019)

Photonic crystal (PhC) nanowires for infrared photodetectors
by: Nawi, Mohd Nuriman, et al.
Published: (2016)

A new factor for fabrication technologies evaluation for silicon nanowire transistors
by: Hashim, Yasir, et al.
Published: (2020)

A new factor for fabrication technologies evaluation for silicon nanowire transistors.
by: yasir, Hashim, et al.
Published: (2020)

Synthesis Of Silicon Nanowires By Carbothermal Evaporation Method Using Metal Catalyst
by: Bahrin, Muhamad Dzulnawarin Kamal
Published: (2017)

The persistence of attentional set and its implications for top-down control
by: Thompson, Catherine
Published: (2009)

A top-down approach in fuzzy controller design with VHDL
by: Khandaker Abul Kalam Azad,, et al.
Published: (1999)

Experimental study on potential use of photochromic thin film as energy harvester
by: Wahid, Zaharah, et al.
Published: (2015)

Experimental study on potential use of photochromic thin film as energy harvester
by: Wahid, Zaharah, et al.
Published: (2015)

Investigation on the mass sensitivity of quartz crystal microbalance gas sensor using finite element simulation
by: Md Ralib, Aliza Aini, et al.
Published: (2019)

An investigation of physical processes in nanosphere lithography
by: Agam, Mohd Arif
Published: (2006)

Novel surface-enhanced raman scattering substrate based on functionalized silicon nanowires
by: Mahmood, Iram, et al.
Published: (2019)

Electrical and temperature characterisation of silicon and germanium nanowire transistors based on channel dimensions
by: Hani Taha, Abd Assamad Al Ariqi
Published: (2020)