Fabrication of Bio-MEMS Nanostructure by focused ion beam

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Fabrication of Bio-MEMS Nanostructure by focused ion beam

This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
Format:	Proceeding Paper
Language:	English
Published:	2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf

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