Fabrication of Bio-MEMS Nanostructure by focused ion beam
This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf |
| _version_ | 1848776004707811328 |
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| author | Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar |
| author_facet | Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar |
| author_sort | Ali, Mohammad Yeakub |
| building | IIUM Repository |
| collection | Online Access |
| description | This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra. The optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6 μm. By using these process parameters, microfeatures such as microholes, micro/nano pillars and etc. were fabricated. |
| first_indexed | 2025-11-14T14:23:12Z |
| format | Proceeding Paper |
| id | iium-2433 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:23:12Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-24332011-12-06T06:04:32Z http://irep.iium.edu.my/2433/ Fabrication of Bio-MEMS Nanostructure by focused ion beam Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar TJ Mechanical engineering and machinery TS Manufactures This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra. The optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6 μm. By using these process parameters, microfeatures such as microholes, micro/nano pillars and etc. were fabricated. 2010 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf Ali, Mohammad Yeakub and Mohd Fuad, Nurul Hajar (2010) Fabrication of Bio-MEMS Nanostructure by focused ion beam. In: International Conference on the Advancement of Materials and Nanotechnology, 29 Nov-1 Dec 2010, Prince Hotel, Kuala Lumpur. http://www.uitm.edu.my/index.php/en/upcoming-events/263-icamn-ii-2010 |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title | Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title_full | Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title_fullStr | Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title_full_unstemmed | Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title_short | Fabrication of Bio-MEMS Nanostructure by focused ion beam |
| title_sort | fabrication of bio-mems nanostructure by focused ion beam |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf |