A review of focused ion beam sputtering

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A review of focused ion beam sputtering

This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical...

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Bibliographic Details
Main Authors:	Ali, Mohammad Yeakub, Hung, Wayne N.P., Fu, Yongqi
Format:	Article
Language:	English
Published:	Springer 2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/1/IJPEM_2010_11_%281%29_157-170.pdf

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