Modeling CMOS wafer production line using promodel software

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Modeling CMOS wafer production line using promodel software

Bibliographic Details
Main Authors:	Al-Khateeb, Khalid A. Saeed, Zainuddin, Khairul Hakimin
Format:	Book Chapter
Language:	English
Published:	IIUM Press 2011
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://irep.iium.edu.my/24073/ http://irep.iium.edu.my/24073/1/chp29.pdf

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