Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittlene...
| Main Authors: | , , , |
|---|---|
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2010
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/23056/ http://irep.iium.edu.my/23056/1/p130.pdf |
| _version_ | 1848779095468408832 |
|---|---|
| author | Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa |
| author_facet | Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa |
| author_sort | Amin, A. K. M. Nurul |
| building | IIUM Repository |
| collection | Online Access |
| description | Silicon has been widely used in different branches of industrial engineering. Most application of
silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips.
Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a
major limitation as the process of removing the material can generate subsurface damage. Silicon is
conventionally finished using grinding followed by polishing and lapping to achieve required surface
finish and surface integrity... |
| first_indexed | 2025-11-14T15:12:20Z |
| format | Proceeding Paper |
| id | iium-23056 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:12:20Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-230562013-06-18T04:28:02Z http://irep.iium.edu.my/23056/ Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa TP Chemical technology Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity... 2010 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/23056/1/p130.pdf Amin, A. K. M. Nurul and Patwari, Muhammed Anayet Ullah and M., Dali and M.I., Musa (2010) Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon. In: IIUM Research, Innovation & Invention Exhibition (IRIIE 2010), 26 - 27 January 2010, Kuala Lumpur. http://www.iium.edu.my/irie/10/sub10/author/list_p.php |
| spellingShingle | TP Chemical technology Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title | Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title_full | Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title_fullStr | Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title_full_unstemmed | Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title_short | Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| title_sort | development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon |
| topic | TP Chemical technology |
| url | http://irep.iium.edu.my/23056/ http://irep.iium.edu.my/23056/ http://irep.iium.edu.my/23056/1/p130.pdf |