Investigation of microholes produced by focused ion beam
micromachining

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Investigation of microholes produced by focused ion beam micromachining

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...

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Bibliographic Details
Main Authors:	Mohd Fuad, Nurul Hajar, Ali, Mohammad Yeakub
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf

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