Investigation of microholes produced by focused ion beam micromachining
This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Trans Tech Publications, Switzerland
2011
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| Online Access: | http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf |
| _version_ | 1848775980877873152 |
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| author | Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub |
| author_facet | Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub |
| author_sort | Mohd Fuad, Nurul Hajar |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. |
| first_indexed | 2025-11-14T14:22:49Z |
| format | Article |
| id | iium-2279 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:22:49Z |
| publishDate | 2011 |
| publisher | Trans Tech Publications, Switzerland |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-22792013-06-27T08:22:41Z http://irep.iium.edu.my/2279/ Investigation of microholes produced by focused ion beam micromachining Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. Trans Tech Publications, Switzerland 2011-06-30 Article PeerReviewed application/pdf en http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf Mohd Fuad, Nurul Hajar and Ali, Mohammad Yeakub (2011) Investigation of microholes produced by focused ion beam micromachining. Advanced Materials Research, 264. pp. 1346-1351. ISSN 1022-6680 http://www.scientific.net doi:10.4028/www.scientific.net/AMR.264-265.1346 |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub Investigation of microholes produced by focused ion beam micromachining |
| title | Investigation of microholes produced by focused ion beam
micromachining |
| title_full | Investigation of microholes produced by focused ion beam
micromachining |
| title_fullStr | Investigation of microholes produced by focused ion beam
micromachining |
| title_full_unstemmed | Investigation of microholes produced by focused ion beam
micromachining |
| title_short | Investigation of microholes produced by focused ion beam
micromachining |
| title_sort | investigation of microholes produced by focused ion beam
micromachining |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf |