Design and modeling of silicon MEMS accelerometer

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Design and modeling of silicon MEMS accelerometer

In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...

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Bibliographic Details
Main Authors:	Hrairi, Meftah, Baharom, Badrul Hanafi
Format:	Proceeding Paper
Language:	English
Published:	2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2052/ http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf

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