Design and modeling of silicon MEMS accelerometer
In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
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2011
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| Online Access: | http://irep.iium.edu.my/2052/ http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf |
| _version_ | 1848775951232532480 |
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| author | Hrairi, Meftah Baharom, Badrul Hanafi |
| author_facet | Hrairi, Meftah Baharom, Badrul Hanafi |
| author_sort | Hrairi, Meftah |
| building | IIUM Repository |
| collection | Online Access |
| description | In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.
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| first_indexed | 2025-11-14T14:22:21Z |
| format | Proceeding Paper |
| id | iium-2052 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:22:21Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-20522012-02-29T03:12:28Z http://irep.iium.edu.my/2052/ Design and modeling of silicon MEMS accelerometer Hrairi, Meftah Baharom, Badrul Hanafi TJ Mechanical engineering and machinery TS Manufactures In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications. 2011-05 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf Hrairi, Meftah and Baharom, Badrul Hanafi (2011) Design and modeling of silicon MEMS accelerometer. In: International Conference on Mechanical, Automotive and Aerospace Engineering, ICMAAE’11, 17 - 19 May, 2011, Kuala Lumpur. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Hrairi, Meftah Baharom, Badrul Hanafi Design and modeling of silicon MEMS accelerometer |
| title | Design and modeling of silicon MEMS accelerometer |
| title_full | Design and modeling of silicon MEMS accelerometer |
| title_fullStr | Design and modeling of silicon MEMS accelerometer |
| title_full_unstemmed | Design and modeling of silicon MEMS accelerometer |
| title_short | Design and modeling of silicon MEMS accelerometer |
| title_sort | design and modeling of silicon mems accelerometer |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/2052/ http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf |