Focused ion beam micromachining: technology and application

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Focused ion beam micromachining: technology and application

Bibliographic Details
Main Authors:	Jaafar, Israd Hakim, Abdul Rahman, Nur Atiqah, Banu, Asfana, Mohammad , Yeakub Ali
Format:	Book Chapter
Language:	English
Published:	IIUM Press 2011
Subjects:	NA Architecture
Online Access:	http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf

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