Focused ion beam micromachining: technology and application
| Main Authors: | , , , |
|---|---|
| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf |
| _version_ | 1848778376924364800 |
|---|---|
| author | Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali |
| author_facet | Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali |
| author_sort | Jaafar, Israd Hakim |
| building | IIUM Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T15:00:54Z |
| format | Book Chapter |
| id | iium-19415 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:00:54Z |
| publishDate | 2011 |
| publisher | IIUM Press |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-194152012-09-24T09:13:16Z http://irep.iium.edu.my/19415/ Focused ion beam micromachining: technology and application Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali NA Architecture IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19415/4/Chapter_15.pdf Jaafar, Israd Hakim and Abdul Rahman, Nur Atiqah and Banu, Asfana and Mohammad , Yeakub Ali (2011) Focused ion beam micromachining: technology and application. In: Advanced Machining Process. IIUM Press, Kuala Lumpur, pp. 77-82. ISBN 9789674181628 http://rms.research.iium.edu.my/bookstore/default.aspx |
| spellingShingle | NA Architecture Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali Focused ion beam micromachining: technology and application |
| title | Focused ion beam micromachining: technology and application |
| title_full | Focused ion beam micromachining: technology and application |
| title_fullStr | Focused ion beam micromachining: technology and application |
| title_full_unstemmed | Focused ion beam micromachining: technology and application |
| title_short | Focused ion beam micromachining: technology and application |
| title_sort | focused ion beam micromachining: technology and application |
| topic | NA Architecture |
| url | http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf |