Micro-hotplate based temperature stabilization system for CMOS SAW resonators

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Micro-hotplate based temperature stabilization system for CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon h...

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Bibliographic Details
Main Authors:	Nordin, Anis Nurashikin, Voiculescu, Ioana, Zaghloul, Mona E.
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2009
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/2/Microsystems2009.pdf

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