Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
| Main Authors: | , , |
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/4/Chapter_9.pdf |
| _version_ | 1848778310404800512 |
|---|---|
| author | Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana |
| author_facet | Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana |
| author_sort | Sutjipto, Agus Geter Edy |
| building | IIUM Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T14:59:51Z |
| format | Book Chapter |
| id | iium-19092 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:59:51Z |
| publishDate | 2011 |
| publisher | IIUM Press |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-190922012-11-06T13:38:08Z http://irep.iium.edu.my/19092/ Electrical property of ITO thin film deposited by Rf Magnetron Sputtering Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana TP Chemical technology IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19092/4/Chapter_9.pdf Sutjipto, Agus Geter Edy and Mohd Fuad, Nurul Hajar and -, Farah Diana (2011) Electrical property of ITO thin film deposited by Rf Magnetron Sputtering. In: Advances in materials engineering - volume 2. IIUM Press, Kuala Lumpur, pp. 49-54. ISBN 9789674181680 http://rms.research.iium.edu.my/bookstore/default.aspx |
| spellingShingle | TP Chemical technology Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title | Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title_full | Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title_fullStr | Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title_full_unstemmed | Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title_short | Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
| title_sort | electrical property of ito thin film deposited by rf magnetron sputtering |
| topic | TP Chemical technology |
| url | http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/4/Chapter_9.pdf |