Quality of copper film electroplated on silicon wafer using different current densities
| Main Author: | |
|---|---|
| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/1/Chapter_6.pdf |
| _version_ | 1848778294577594368 |
|---|---|
| author | Mridha, Shahjahan |
| author_facet | Mridha, Shahjahan |
| author_sort | Mridha, Shahjahan |
| building | IIUM Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T14:59:36Z |
| format | Book Chapter |
| id | iium-19027 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:59:36Z |
| publishDate | 2011 |
| publisher | IIUM Press |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-190272012-09-21T08:14:26Z http://irep.iium.edu.my/19027/ Quality of copper film electroplated on silicon wafer using different current densities Mridha, Shahjahan TP1080 Polymers, plastics and their manufacture IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19027/1/Chapter_6.pdf Mridha, Shahjahan (2011) Quality of copper film electroplated on silicon wafer using different current densities. In: Advances in materials engineering. IIUM Press, Kuala Lumpur, pp. 28-38. ISBN 9789674181673 http://rms.research.iium.edu.my/bookstore/default.aspx |
| spellingShingle | TP1080 Polymers, plastics and their manufacture Mridha, Shahjahan Quality of copper film electroplated on silicon wafer using different current densities |
| title | Quality of copper film electroplated on silicon wafer using different current densities |
| title_full | Quality of copper film electroplated on silicon wafer using different current densities |
| title_fullStr | Quality of copper film electroplated on silicon wafer using different current densities |
| title_full_unstemmed | Quality of copper film electroplated on silicon wafer using different current densities |
| title_short | Quality of copper film electroplated on silicon wafer using different current densities |
| title_sort | quality of copper film electroplated on silicon wafer using different current densities |
| topic | TP1080 Polymers, plastics and their manufacture |
| url | http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/1/Chapter_6.pdf |