High speed end milling of single crystal silicon wafer

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High speed end milling of single crystal silicon wafer

Presently, silicon is the most important semiconducting material used in the electronic industry. Silicon has also found application in energy and mechanical application such as electro-optics and micro-electro mechanical system (MEMS) devices. The process of machining silicon requires high quality...

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Bibliographic Details
Main Authors:	Amin, A. K. M. Nurul, Musa, Mohd Dali
Format:	Book
Language:	English
Published:	LAP Lambert Academic Publishing 2011
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/17634/ http://irep.iium.edu.my/17634/1/Silicon_Machining.pdf

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