Simulation of MEMs piezoelectric energy harvester
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2010
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| Online Access: | http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf |
| _version_ | 1848777825247559680 |
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| author | Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim |
| author_facet | Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim |
| author_sort | Md Ralib, Aliza Aini |
| building | IIUM Repository |
| collection | Online Access |
| description | The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions. |
| first_indexed | 2025-11-14T14:52:08Z |
| format | Proceeding Paper |
| id | iium-15698 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:52:08Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-156982012-01-12T05:02:05Z http://irep.iium.edu.my/15698/ Simulation of MEMs piezoelectric energy harvester Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions. 2010 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf Md Ralib, Aliza Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of MEMs piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim Simulation of MEMs piezoelectric energy harvester |
| title | Simulation of MEMs piezoelectric energy harvester |
| title_full | Simulation of MEMs piezoelectric energy harvester |
| title_fullStr | Simulation of MEMs piezoelectric energy harvester |
| title_full_unstemmed | Simulation of MEMs piezoelectric energy harvester |
| title_short | Simulation of MEMs piezoelectric energy harvester |
| title_sort | simulation of mems piezoelectric energy harvester |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf |