Design and modelling of an impedance-based MEMS biosensor

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Design and modelling of an impedance-based MEMS biosensor

This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...

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Bibliographic Details
Main Authors:	Jamil, Nadira, Nordin, Anis Nurashikin, Voiculescu, Ioana
Format:	Proceeding Paper
Language:	English
Published:	2011
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf

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