Design and modelling of an impedance-based MEMS biosensor
This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf |
| _version_ | 1848777770221436928 |
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| author | Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana |
| author_facet | Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana |
| author_sort | Jamil, Nadira |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to verify the functionality and obtain the optimal design parameters for detection of biological cells. Placement of the cells at the centre of the device will load the acoustic waves, resulting in a damped and slower electrical signal. Our design aims to defeat limitations of the current biosensor in terms of cost, size and most important the speed of analysis. Impedance-based MEMS biosensor has the ability to monitor the cell response to electricity flow. A two dimensional finite element model (FEM) was created using COMSOL Multiphysics 3.5a to observe the change in impedance of the device model. |
| first_indexed | 2025-11-14T14:51:16Z |
| format | Proceeding Paper |
| id | iium-15123 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:51:16Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-151232012-01-20T05:36:06Z http://irep.iium.edu.my/15123/ Design and modelling of an impedance-based MEMS biosensor Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana TK7885 Computer engineering This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to verify the functionality and obtain the optimal design parameters for detection of biological cells. Placement of the cells at the centre of the device will load the acoustic waves, resulting in a damped and slower electrical signal. Our design aims to defeat limitations of the current biosensor in terms of cost, size and most important the speed of analysis. Impedance-based MEMS biosensor has the ability to monitor the cell response to electricity flow. A two dimensional finite element model (FEM) was created using COMSOL Multiphysics 3.5a to observe the change in impedance of the device model. 2011-09 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/15123/1/06088352.pdf Jamil, Nadira and Nordin, Anis Nurashikin and Voiculescu, Ioana (2011) Design and modelling of an impedance-based MEMS biosensor. In: Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on, 28-30 Sept., 2011, Kota Kinabalu. http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6086117 |
| spellingShingle | TK7885 Computer engineering Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Design and modelling of an impedance-based MEMS biosensor |
| title | Design and modelling of an impedance-based MEMS biosensor |
| title_full | Design and modelling of an impedance-based MEMS biosensor |
| title_fullStr | Design and modelling of an impedance-based MEMS biosensor |
| title_full_unstemmed | Design and modelling of an impedance-based MEMS biosensor |
| title_short | Design and modelling of an impedance-based MEMS biosensor |
| title_sort | design and modelling of an impedance-based mems biosensor |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf |