Surface finish prediction models for precision grinding of silicon

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Surface finish prediction models for precision grinding of silicon

Conventional grinding of silicon substrates results in poor surface quality unless they are machined in ductile mode on expensive ultra-precision machine tools. However, precision grinding can be used to generate massive ductile surfaces on silicon so that the polishing time can be reduced imme...

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Bibliographic Details
Main Authors:	Alao, Abdur-Rasheed, Konneh, Mohamed
Format:	Article
Language:	English
Published:	Springer 2011
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/14277/ http://irep.iium.edu.my/14277/5/Surface_finish_prediction_models_for_precision_grinding_of_silicon2012.pdf

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