Fabrication and characterization of sub polymeric microring resonators for biosensors

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Fabrication and characterization of sub polymeric microring resonators for biosensors

In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam litho...

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Bibliographic Details
Main Authors:	Mohd Salleh, Mohd Hazimin, Cooper, Jonathan M, Glidle, Andrew
Format:	Proceeding Paper
Language:	English
Published:	2009
Subjects:	Q Science (General) QC Physics
Online Access:	http://irep.iium.edu.my/12513/ http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf

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